Metalorganic vapour phase epitaxy



Metalorganic vapour phase epitaxy (MOVPE) is a Pa). As such this technique is preferred for the formation of devices incorporating thermodynamically metastable alloys. It has become the dominant process for the manufacture of laser diodes, solar cells, and LEDs.


Reactor components

  • A reactor is a chamber made of a material that does not react with the chemicals being used. It must also withstand high temperatures. This chamber is composed by reactor walls, liner, a susceptor, gas injection units, and temperature control units. Usually, the reactor walls are made from stainless steel or quartz. To prevent over heating, cooling water must be flowing through the channels within the reactor walls. Special glasses, such as quartz or ceramic, are often used as the liner in the reactor chamber between the reactor wall and the susceptor. A substrate sits on a susceptor which is at a controlled temperature. The susceptor is made from a material resistant to the metalorganic compounds used; graphite is sometimes used. For growing nitrides and related materials, a special coating on the graphite susceptor is necessary to prevent corrosion by ammonia (NH3) gas.


  • Gas inlet and switching system. Gas is introduced via devices known as 'bubblers'. In a bubbler a carrier gas (usually temperature. Allowance must be made for saturated vapours.
  • Pressure maintenance system
  • Gas Exhaust and cleaning System. Toxic waste products must be converted to liquid or solid wastes for recycling (preferably) or disposal. Ideally processes will be designed to minimize the production of waste products.

Metalorganic gases

A non-exhaustive list of metalorganic chemicals used to grow semiconductors by MOVPE.

  • Gallium
    • Trimethylgallium (TMG or TMGa)
    • Triethylgallium (TEG or TEGa)
    • Triisopropylgallium (TIPG or TIPGa) Ga(C3H7)3

Semiconductors grown by MOVPE

III-V semiconductors

II-VI semiconductors

IV Semiconductors

  • Si
  • Ge
  • Strained silicon

See also

Environment, Health and Safety

  • Environment, Health and Safety Aspects of Metalorganic Sources used in MOVPE Growth of Compound Semiconductors: From Journal of Crystal Growth (2004).

Further reading

Gerald B. Stringfellow (1999). Organometallic Vapor-Phase Epitaxy: Theory and Practice (2nd ed.). Academic Press (ISBN 0-12-673842-4).

 
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