Trichlorosilane



Trichlorosilane
IUPAC name trichlorosilane
Other names silyl trichloride
Identifiers
CAS number 10025-78-2
SMILES [H][Si](Cl)(Cl)Cl
Properties
Molecular formula HCl3Si
Molar mass 135.45 g mol−1
Appearance colourless liquid
Density 1.342
Melting point

−126.6 °C

Boiling point

32 °C

Solubility in water decomposes in H2O
Except where noted otherwise, data are given for
materials in their standard state
(at 25 °C, 100 kPa)
Infobox disclaimer and references

Trichlorosilane is a organic compounds.

Production

Industrially, trichlorosilane is produced by blowing chemical equation

Si + 3 HCl → HSiCl3 + H2

A properly designed reactor can achieve a yield of 80-90% trichlorosilane. The major byproducts are silicon tetrachloride (distillation.

The reverse process is used to produce of silicon of higher purity.

References

|Semiconductors: Silicon: Substrate Manufacture: Polycrystalline Silicon Production

External links
 
This article is licensed under the GNU Free Documentation License. It uses material from the Wikipedia article "Trichlorosilane". A list of authors is available in Wikipedia.